Microfabrication Fundamental Processes

Overview

Thin-film deposition, lithography, and etching form the most fundamental processes used in microfabrication to create devices. This course introduces these processes, providing learners with an understanding of the techniques, physical phenomena, and material properties that inform fabrication decisions. This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.

Syllabus

Thin Film Deposition

In this module we cover thin film deposition using both physical and chemical methods. We briefly discuss some of the important features of thin films that determine the materials and deposition processes selected. A general introduction is provided for some of the most commonly used physical and chemical deposition methods.

Lithography Techniques

In this module we discuss lithography techniques and technologies, which are one of the foundational process steps to all microfabrication technologies.

Etching Techniques

This module presents an introduction to the fundamental micromachining technology of etching. This is a subtractive process where material is removed to create or transfer pattern to thin film layers.