Introduction to Micro Electro Mechanical Systems (MEMS)

Overview

MEMS devices leverage the same equipment and processes used for semiconductor devices to create microscale sensors and actuators that drive innovation across a wide range of technologies in modern society. Through this course, learners will be able to demonstrate how these processes are specifically used for MEMS fabrication and highlight some differences from semiconductor fabrication. Key applications in consumer, industrial, aerospace, and medical applications are highlighted and described in more detail. This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.

Syllabus

Fabrication Processes Specific to MEMS

In this module, we dive into some of the specifics involved in the creation of MEMS devices. We begin by briefly covering some of the physical phenomena used in MEMS devices and then discuss the differences between bulk and surface micromachining fabrication processes. Lastly, we provide more detail around requirements and techniques used in the packaging for MEMS.

MEMS in Consumer, Aerospace, Industrial

This Module covers the field of Micro Electromechanical Systems from the MEMS device design and system specification point of view. The most widely deployed MEMS inertial sensors and MEMS pressure sensors device model, design and fabrication are introduced. Ongoing development of transducer architecture for various applications is presented.

MEMS for Medical Applications

In this module, we discuss the application of MEMS fabrication techniques and MEMS devices to the field of medical applications. We highlight key design considerations and device testing that are specific for devices used in the medical field. Some commercial examples of MEMS medical devices are reviewed and two technologies with unique medical applications, microfluidics and microelectrodes, are discussed in more detail.