Introduction to Microfabrication

Overview

In this introductory course, the field of microfabrication and how it is used to create semiconductor and MEMS devices is presented. Learners will develop a high-level understanding of the basic principles of physics and material properties that power the functionality of these technologies. A foundational overview provides learners with a greater appreciation of the varied and interconnected driving forces that influence device design, fabrication, and testing through the lenses of the fabrication process flow, commercial market, and value chain. Introduction to the cleanroom as a critical component of device success familiarizes learners to the microfabrication environment. This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.

Syllabus

Microtechnology Introduction and Overview

The first module provides an overview of the specialization and begins with a brief introduction to microfabrication technology. The microfabrication ecosystem is introduced along with some context concerning the CHIPS Act 2023 and the motivation for domestic fabrication. Some basic terminology and fundamental concepts is established to prepare you as we dive deeper into each of our topics in subsequent modules. The history of computing and MEMS is succinctly discussed and the development of these technologies over the decades is covered. Note: Some lectures reference hands-on sessions that are not available in this presentation of the content. Additionally, the "course syllabus" is not relevant for this course as the content has been reorganized to improve comprehension and flow.

Microfabrication Process Flow

In this module, we provide an overview of the fabrication process and walk through examples of how processes integrate to create device layers. Lastly, an introduction to vacuum science and technology provides a foundation for understanding many critical fabrication processes.