Micro and Nanofabrication (MEMS)

Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment. Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more. Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment. For some selected examples, students will also be able to set process parameters on a virtual panel to see how it affects the processing results.